Transducers

Details Transducers Transducers

H - Electricity

01

L

H01L 41/18 (2006.01) H01L 41/22 (2006.01)

Patent

CA 2748356

A method of making an ultrasound transducer includes providing a piezoelectric crystal of PIN-PMN-PT (lead indium niobate-lead magnesium niobate-lead titanate) and etching kerfs into the piezoelectric crystal using a laser. In at least some embodiments, each kerf has a width of no more than 4 um. The kerfs are filled with a non-piezoelectric material to form an array of piezoelectric elements.

L'invention concerne un procédé de production d'un transducteur ultrasonore comprenant un cristal piézo-électrique de PIN-PMN-PT (plomb indium niobate - plomb magnésium niobate - plomb titanate) et des entailles de gravure effectuées au laser dans ledit cristal piézo-électrique. Dans au moins certains modes de réalisation, chaque entaille présente une profondeur inférieure ou égale à 4 µm. Les entailles sont remplies d'un matériau non piézo-électrique pour former un réseau d'éléments piézo-électriques.

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