Method and device for detecting spatial structure...

G - Physics – 01 – N

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G01N 27/20 (2006.01) G06K 9/00 (2006.01)

Patent

CA 2355144

In order to detect the characteristics of the spatial structure of an electroconductive crystal (1), especially a semiconductor, a measuring current is supplied to said crystal and charge distribution is measured at a point (3) different from the current input (4) of the crystal. Information on the spatial structure characteristics is obtained from the relationship between measured charge distribution and standard distribution. In order to produce a defined temporary modification of the spatial structure, the crystal can be subjected to acoustic vibration, especially to the influence of ultrasonic waves (24), which is then measured. The appropriate device for said purpose comprises an electrically conductive crystal structure (1) with source electrodes (4) for supplying a current to the crystal, drain electrodes (3) for removing a current from the crystal and electronic evaluation circuits (20) for obtaining information on the spatial structure of the crystal on the basis of the measured current.

Selon l'invention, pour la détection de caractéristiques de la structure spatiale d'un cristal (1) électroconducteur, en particulier d'un semi-conducteur, on conduit audit cristal un courant de mesure et l'on effectue, en un point (3) du cristal différent du point d'entrée de courant (4), une mesure de la répartition des charges. A partir du rapport entre la répartition des charges mesurée et une répartition standard, on obtient des informations concernant les caractéristiques de la structure spatiale. A cet effet, on peut, pour produire une modification temporelle définie de la structure spatiale, exposer le cristal à une vibration acoustique, en particulier à l'influence d'ondes ultrasonores (24), qui est mesurée. Un dispositif permettant d'effectuer cette détection est constitué d'une structure cristalline (1) électroconductrice comportant des électrodes de source (4) servant à l'injection d'un courant dans le cristal, des électrodes de puits (3), servant au prélèvement d'un courant du cristal, et des circuits d'évaluation électroniques (20) servant à l'obtention d'informations relatives à la structure spatiale du cristal, à partir du courant mesuré.

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