Apparatus for zone refining semiconductor rods

Details Apparatus for zone refining semiconductor rods Apparatus for zone refining semiconductor rods

C - Chemistry, Metallurgy

30

B

148/1.3

C30B 13/00 (2006.01) C30B 13/28 (2006.01) C30B 13/32 (2006.01) C30B 15/00 (2006.01)

Patent

CA 1101316

ABSTRACT OF THE DISCLOSURE The invention provides an apparatus for zone refining polycrystalline semiconductor rods to produce mono- crystalline semiconductor rods. The apparatus permits the processing of larger diameter rods, and longer rods, without unduly increasing the overall height of the apparatus. The apparatus is provided with an induction heating chamber in which the longitudinal dimension is not determined by the length of the rod to be refined, but rather is limited only by considerations of space for the RF coil and related apparatus which must be mounted in the chamber, viewing space for the operator and the heating effect on the structure above and below the chamber. The semiconductor rod extends above the induction heating chamber initially and below the chamber at the conclusion of the refining process. An upper metal bellows extends from the top of the rod holder to the top of the chamber and a similar lower bellows extends from the bottom of the seed holder to the bottom of the chamber. A telescoping group of steel cylinders are placed inside the lower bellows to protect the lower bellows from any molten semiconductor which may drop from the melt zone. The telescoping group of steel cylinders surrounds the seed holder and the largest of the cylinders is attached in common with the lower bellows to the induction heating chamber and the smallest is attached to the base of the seed holder.

293829

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