Electronic detection device and the detector equipped with...

H - Electricity – 01 – L

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H01L 31/02 (2006.01) G01D 11/00 (2006.01) G01J 1/42 (2006.01) G01J 5/20 (2006.01) H01L 31/04 (2006.01) B81B 1/00 (2006.01) B81B 7/02 (2006.01)

Patent

CA 2598596

Ce dispositif électronique de détection comprend un substrat (1) et au moins une microstructure, ladite microstructure comprenant une membrane (9) s'étendant sensiblement en regard et à distance dudit substrat (1), ladite membrane (9) étant solidarisée mécaniquement et connectée électriquement à au moins un élément longiligne de maintien (21, 22), ce dernier étant relié mécaniquement et électriquement audit substrat (1) par l'intermédiaire d'au moins un pilier (5). Le dispositif comprend en outre au moins un élément raidisseur (10-13) s'étendant sur au moins l'une des faces principales de ladite microstructure.

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