Silicon transducer

Details Silicon transducer Silicon transducer

G - Physics

01

L

356/200, 73/3, 3

G01L 7/08 (2006.01) G01L 9/00 (2006.01) H01L 29/84 (2006.01)

Patent

CA 1125049

J. C. Greenwood 37 (Rev) TRANSDUCER AND METHOD OF MAKING THE SAME ABSTRACT OF THE INVENTION A silicon transducer including a silicon frame with one or more lands extending from a diaphragm or the like. The lands are interconnected by two thin strips formed integrally with the lands. The strips are essentially the transducer. The transducer is constructed by etching a boron doped wafer with a mixture of catechol, ethylene diamine and water.

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