Semiconductor processing apparatus and electrode member...

Details Semiconductor processing apparatus and electrode member... Semiconductor processing apparatus and electrode member...

H - Electricity

01

L

H01L 21/00 (2006.01) H01B 1/00 (2006.01) H01J 37/32 (2006.01) H01L 21/68 (2006.01) H01L 23/48 (2006.01)

Patent

CA 2404582

The present invention is directed to a semiconductor processing apparatus having an oxidation-free electrode member for power supply. An electrode member (11) is used for supplying electricity from an external power source to a susceptor (1), which is heated so as to heat a wafer loaded thereon. The electrode member (11) has a thermal expansion coefficient in the range of 3.0 x 10-6 /K to 8.0 x 10-6 /K at a temperature from room temperature to 500°C, electric resistance of 10-3 .OMEGA. cm or less at room temperature. The weight increase due to oxidation is equal to or less than 0.1% / hour at 500°C in the atmosphere.

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