Method of forming thin film of inorganic solid electrolyte

Details Method of forming thin film of inorganic solid electrolyte Method of forming thin film of inorganic solid electrolyte

H - Electricity

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H01M 4/04 (2006.01) B05D 3/02 (2006.01) B05D 5/12 (2006.01) C23C 14/06 (2006.01) C23C 16/00 (2006.01) C23C 16/30 (2006.01) H01B 13/00 (2006.01) H01M 2/14 (2006.01) H01M 4/02 (2006.01) H01M 4/36 (2006.01) H01M 4/88 (2006.01) H01M 10/36 (2006.01)

Patent

CA 2360719

A method of producing a thin film of an inorganic solid electrolyte having a relatively high ionic conductance is provided. In the method, a thin film made of an inorganic solid electrolyte is formed, by a vapor deposition method, on a base member being heated. The thin film obtained through the heat treatment exhibits an ionic conductance higher than that of the thin film formed on the base member not being heated. The ionic conductance can also be increased through the steps of forming the thin film made of the inorganic solid electrolyte on the base member at room temperature or a temperature lower than 40°C and then heating the thin film of the inorganic solid electrolyte.

On présente une méthode de production d'une couche mince d'une électrolyte solide inorganique ayant une conductance ionique relativement élevée. Dans la méthode, une couche mince constituée d'une électrolyte solide inorganique est formée, par un procédé de dépôt en phase vapeur, sur un élément de base étant chauffé. La couche mince obtenue par le traitement thermique présente une conductance ionique supérieure à celle de la couche mince formée sur l'élément de base qui n'est pas chauffée. On peut également augmenter la conductance ionique par les étapes consistant à former la couche mince constituée d'électrolyte solide inorganique sur l'élément de base à température ambiante ou à une température inférieure à 40.degrés.C et à chauffer ensuite la couche mince d'électrolyte solide inorganique.

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