Method for producing oriented piezoelectric films

Details Method for producing oriented piezoelectric films Method for producing oriented piezoelectric films

H - Electricity

01

L

H01L 41/22 (2006.01) C23C 14/06 (2006.01) C23C 14/34 (2006.01) C30B 23/02 (2006.01)

Patent

CA 2314302

Highly oriented thin films exhibiting good piezoelectric effects are formed in a reaction chamber. This is done by bombarding a target comprising a piezoelectric material. Dislodged particles from the target are ionized and then electrostatically attracted to the surface of a substrate where they are neutralized and deposited in an ordered way.

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