Method and apparatus for making elongated si and sic structures

C - Chemistry – Metallurgy – 30 – B

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148/2.3

C30B 31/10 (2006.01) C01B 31/36 (2006.01) C01B 33/02 (2006.01) C04B 35/571 (2006.01) C23C 16/01 (2006.01)

Patent

CA 971465

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