G - Physics – 01 – M
Patent
G - Physics
01
M
73/118, 73/77, 3
G01M 3/20 (2006.01)
Patent
CA 1093859
ABSTRACT OF THE DISCLOSURE A plurality of fine leak test chambers for fast individual testing of hermetically plated microelectronic devices. Each microcircuit component, having already been subjected to a controlled environment of 5 percent, having already been subjected to a controlled environment of the chambers and sealed therein. The chambers are evacuated and helium flow rate (if present) is measured by a spectrometer.
315005
Ruwe Victor W.
White James W.
Allen John A.
United States (government Of The) As Represented By The Secretary Of Th E. Army
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