Method of etching a surface of a substrate comprising linbo3

Details Method of etching a surface of a substrate comprising linbo3 Method of etching a surface of a substrate comprising linbo3

C - Chemistry, Metallurgy

23

F

149/12, 149/21

C23F 1/00 (2006.01) C04B 41/53 (2006.01) C04B 41/91 (2006.01) C09K 13/08 (2006.01)

Patent

CA 1042773

A METHOD OF ETCHING A SURFACE OF A SUBSTRATE COMPRISING LiNbO3 Abstract of Disclosure A method of etching a surface of a substrate comprising lithium niobate (LiNbO3) is disclosed. The method includes contacting the surface with a mixture comprising hydrofluoric acid and sulfuric acid. -i-

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