Spatial control of lifetime in semiconductor devices

Details Spatial control of lifetime in semiconductor devices Spatial control of lifetime in semiconductor devices

H - Electricity

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L

356/185

H01L 29/167 (2006.01) H01L 21/00 (2006.01) H01L 21/18 (2006.01) H01L 29/00 (2006.01) H01L 29/04 (2006.01)

Patent

CA 1032661

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