Method of treating a monocrystalline body

Details Method of treating a monocrystalline body Method of treating a monocrystalline body

H - Electricity

01

L

356/178, 356/188

H01L 21/00 (2006.01) C30B 25/16 (2006.01) G01B 11/06 (2006.01)

Patent

CA 1112375

ABSTRACT: A method in which a monocrystalline body is subjected in a gas atmosphere to a treatment changing the thickness of the body, in which the thickness of the body is controlled by means of a measuring member which is subjected to the same treatment and which measuring member, on its side which is subjected to the treatment, consists of a monocrystalline layer and an adjoining substratum of a material having a refractive index differing of that the monocrystal- line layer material, characterized in that a measur- ing member is used in the manufacture of which the sub- stratum is provided on a free surface of the mono- crystalline layer. -12-

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