Photodiode having enhanced long wavelength response

Details Photodiode having enhanced long wavelength response Photodiode having enhanced long wavelength response

H - Electricity

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H01L 27/14 (2006.01) H01L 29/12 (2006.01) H01L 31/0216 (2006.01) H01L 31/0236 (2006.01) H01L 31/105 (2006.01) H01L 31/107 (2006.01)

Patent

CA 1151274

RCA 73,543 PHOTODIODE HAVING ENHANCED LONG WAVELENGTH RESPONSE Abstract of the Disclosure The light entry surface or back surface of an avalanche or p-i-n photodiode is contoured in a regular array of indentations which are hemispherical or almost hemispherical in shape. Light incident on the photodiode undergoes multiple interactions with the contoured surface, thus reducing the entry surface reflectivity and increasing the optical path length in the photodiode, and thereby enhancing its long wavelength response.

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