Process and apparatus for the preparation of...

Details Process and apparatus for the preparation of... Process and apparatus for the preparation of...

H - Electricity

01

L

31/106, 356/187,

H01L 21/18 (2006.01) C01B 33/035 (2006.01) C23C 16/46 (2006.01)

Patent

CA 1073117

ABSTRACT OF THE DISCLOSURE For preheating a carrier in the form of a wire or fila- ment of hyperpure silicon to a conduction temperature at which an electric current can be passed directly therethrough, a gaseous heat medium such as hydrogen is passed through the interstices of a heated aggregate of hyperpure silicon grains and is thereby both heated and freed from contaminants. The heat medium is then introduced into contact with the silicon carrier thereby preheat- ing same to the conduction temperature. The thus preheated car- rier is further heated to a precipitation temperature by direct passage of a current therethrough, and as a gaseous mixture of monosilane or trichlorosilane and hydrogen is the introduced into contact with the heated carrier, pure elementary silicon precipitates and grows thereon. The granular silicon aggregate can be filled in a vessel of high purity silicon or the like, with a heater provided exteriorly of the vessel for heating the silicon grains therethrough.

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