Sextupole system for the correction of spherical aberration

Details Sextupole system for the correction of spherical aberration Sextupole system for the correction of spherical aberration

H - Electricity

01

J

355/9

H01J 29/56 (2006.01) H01J 3/12 (2006.01) H01J 37/153 (2006.01)

Patent

CA 1140269

ABSTRACT OF THE DISCLOSURE A means is provided for compensating for spherical aberration in charged particle beam devices. The means includes a sextupole positioned between two focusing lenses.

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