Inspection apparatus for defects on patterns

Details Inspection apparatus for defects on patterns Inspection apparatus for defects on patterns

H - Electricity

04

N

350/32

H04N 7/18 (2006.01) G01N 21/956 (2006.01)

Patent

CA 1126854

ABSTRACT An inspection apparatus for defects on patterns is disclosed which has a television camera picking up an object with a pattern to be inspected, an inspection device receiving an output from the television camera to inspect the object, an optical mask having a reference pattern made of opaque material and transparent material and serving as a reference for in- spection of defects of the object, and a device for supporting the optical mask between the television camera and the object on the optical axis of the television camera in such a manner that the patterns of the object and optical mask are matched with each other on the optical axis of the television camera.

344801

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