Apparatus for inspecting average size of fundamental patterns

Details Apparatus for inspecting average size of fundamental patterns Apparatus for inspecting average size of fundamental patterns

G - Physics

01

B

354/138, 354/27

G01B 11/02 (2006.01)

Patent

CA 1152216

- 32 - Abstract of the Disclosure Disclosed is an apparatus for determining the average size of fundamental patterns contained in a given region of an object to be inspected, which inclu- des Fourier transform means for producing output data corresponding to a Fourier transform pattern image of the given region of the object, and processor means for processing the output data to provide the actual pattern size information. The Fourier transform means includes a Fourier con- verter for providing the output data corresponding to Fourier transform patterns. The processor means inclu- des an extractor coupled to the Fourier transform means for extracting a specific data (In) representing the order n of spatial frequency component (e.g. 200) from the output data, the magnitude of the order n component changing with variation (e.g. .DELTA.aH) of the size of patterns; and a data processor coupled to the extractor for determining the average size of patterns in the given region according to the specific data (In) and providing the actual pattern size information indicating the average size of the patterns.

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