Method for producing supports made from silicon or silicon...

Details Method for producing supports made from silicon or silicon... Method for producing supports made from silicon or silicon...

H - Electricity

01

L

148/3, 117/85, 4

H01L 21/00 (2006.01) B28B 1/48 (2006.01) C23C 16/22 (2006.01) C30B 31/14 (2006.01) H01L 21/673 (2006.01)

Patent

CA 1035209

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