Semiconductor memory device

Details Semiconductor memory device Semiconductor memory device

G - Physics

11

C

352/82.1

G11C 11/40 (2006.01) G11C 11/404 (2006.01) H01L 27/108 (2006.01)

Patent

CA 1144645

SEMICONDUCTOR MEMORY DEVICE ABSTRACT OF THE DISCLOSURE A semiconductor device in which gates are formed in V-shaped grooves which grooves are formed in a semiconductor bulk, and which device has VMIS transistors which make access to information by giving or taking out an electric charge with respect to junction capacitances established by capacitor regions that are embedded in the vicinity of the tips of V-shaped grooves. The feature of the semiconductor device resides in that the capacitor region, consisting of an embedded layer of capacitors over a large area, is divided by the tips of a plurality of V-shaped grooves.

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