Opto-electronic focussing error detection arrangement

Details Opto-electronic focussing error detection arrangement Opto-electronic focussing error detection arrangement

G - Physics

11

B

352/32.21, 88/94

G11B 7/00 (2006.01) G02B 7/28 (2006.01) G11B 7/09 (2006.01) G11B 7/135 (2006.01)

Patent

CA 1139878

ABSTRACT: An opto-electronic focussing-error detection arrangement is described for the detection of a devia- tion between a radiation reflecting surface and the plane of focuseing of an objective system. In the path of the beam which is reflected by the surface a beam-splitting element is disposed and behind said element two radiation- sensitive detectors are arranged which are each associated with one of the subbeams formed by the beam-splitting element. The detectors are grating-shaped detectors and are effectively divided into two detector sections by selection devices, the bounding line being adjustable. A focussing error signal is obtained which is highly independent of a positional error of the radiation-sen- sitive detection system relative to the beam axis.

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