300mm microenvironment pod with door on side

Details 300mm microenvironment pod with door on side 300mm microenvironment pod with door on side

B - Operations, Transporting

65

D

B65D 85/86 (2006.01) H01L 21/673 (2006.01) H01L 21/68 (2006.01) H05F 3/02 (2006.01) G11B 33/04 (2006.01) G11B 33/14 (2006.01)

Patent

CA 2218260

A container for creating a microenvironment is disclosed. The container includes a shell (10), a door (90) and a plurality of supports (60) having a unique design which are used to securely retain items, such as silicon wafers (80), in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures (44-46) are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.

Réceptacle servant à créer un micro-environnement et comprenant une coque (10), une porte (90) et une pluralité de supports (60) de même type qui sont utilisés pour retenir de manière sûre des objets tels que des tranches de silicium (80), en parallèle et espacées les unes des autres. Les supports sont amovibles. Les structures à couplage cinématique (44-46) sont également prévues pour positionner le réceptacle sur une surface de façon à, par exemple, aligner correctement la porte sur le port d'accès d'un outil de traitement des tranches.

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