A device and a method for detecting leaks

Details A device and a method for detecting leaks A device and a method for detecting leaks

G - Physics

01

M

358/9

G01M 3/16 (2006.01) G01M 3/20 (2006.01)

Patent

CA 2031075

W336 Abstract The invention relates to a device for detecting leaks in a test object (1), which is contained in a test container (2). The device includes a mass spectrometer (14) detecting a noble gas such as helium, and a pump arrangement containing a prima- ry vacuum pump (13) and a spiromolecular pump (11), the noble gas atoms flowing through the latter in opposition to the pump direction towards the mass spectrometer. Between the test container (2) and a port (10) of the spiromo- lecular pump (11), an accumulation chamber (8) is inserted, whose volume is considerably larger than that of the test container (2). The test container is provided with means (3, 4) for purging with a purge gas under an adjustable overpres- sure, and closure valves (7, 9) are disposed between the test container (2) and the accumulation chamber (8) as well as between the accumulation chamber (8) and said port (10) of the spiromolecular pump (11). Figure 1

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