G - Physics – 03 – F
Patent
G - Physics
03
F
G03F 7/22 (2006.01) G03B 27/50 (2006.01) G03F 7/20 (2006.01) H01L 21/027 (2006.01)
Patent
CA 2410328
18 The invention provides apparatus for exposing a face (22) of a panel (20), in particular a printed circuit panel, the device including a light source (26). The device further comprising: .cndot. two moving shutters (16A, 168) suitable for masking said light source (26), each of said shutters (16A, 16B) presenting a respective edge, said edges together defining a window through which a light zone is generated on said face (22) of the panel (20) to be exposed; .cndot. means (32) for displacing said shutters (16A, 16B) in a plane (P) lying between said light source (26) and said panel (20); and .cndot. control means (34') for controlling the displacement of said shutters (16A, 26B) in such a manner that both shutters (16A, 16B) move past said face (22) of the panel (20) at substantially the same speed (V) and in the same direction.
Cuevas Manuel
Vibet Gilles
Automa-Tech
Sim & Mcburney
LandOfFree
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