A device for measuring relative position error

Details A device for measuring relative position error A device for measuring relative position error

G - Physics

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M

G01M 11/02 (2006.01) B23K 26/04 (2006.01) G01B 11/00 (2006.01) G03F 7/20 (2006.01) G03F 9/00 (2006.01) H05K 3/00 (2006.01) H05K 1/02 (2006.01)

Patent

CA 2324913

The invention relates to a device for measuring relative position error between a laser beam (14) and a target (10). The target (10) is provided with a circular orifice (16) occupying a reference position relative to said target (10). The device has means (12) for focusing the laser beam in the plane of said target, means (17) for taking an image of said circular hole and of the beam focused in the plane of said target, and means (18) for calculating the components of the segment joining said point of impact and the center of said hole.

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