A dual bandwidth bolometer

G - Physics – 01 – J

Patent

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Details

G01J 5/20 (2006.01) H01L 27/146 (2006.01) H01L 31/058 (2006.01)

Patent

CA 2295662

A dual function pixel of an array, having a large fill factor, for detecting visible light and infrared radiation through the same surface area of the pixel. Infrared radiation is absorbed by a conductive oxide layer. This absorbing layer heats up a heat detection layer which thereby indicates the impingement infrared radiation. An infrared reflecting layer made from a conductive oxide reflects infrared light passing through the absorbing layer, back to the absorbing layer. Visible light can pass through all of the layers of the pixel, which are optically transparent, to a visible light detector situated in the substrate of each pixel of the array.

L'invention concerne un pixel à fonction double d'une matrice, présentant une résolution élevée, destiné à détecter la lumière visible et le rayonnement infrarouge à travers la même zone de surface du pixel. Le rayonnement infrarouge est absorbé par une couche oxyde conductrice. Cette couche absorbante réchauffe une couche de détection thermique qui de ce fait indique l'incidence d'un rayonnement infrarouge. Une couche réfléchissant l'infrarouge fabriquée à partir d'un oxyde conducteur renvoie la lumière infrarouge traversant la couche absorbante vers la couche absorbante. La lumière visible peut traverser toutes les couches du pixel qui sont optiquement transparentes vers un détecteur de lumière visible placé dans le substrat de chaque pixel de la matrice.

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