A fiber optic pressure sensor for catheter use

Details A fiber optic pressure sensor for catheter use A fiber optic pressure sensor for catheter use

G - Physics

01

L

G01L 11/02 (2006.01) A61B 5/0215 (2006.01) G01L 7/08 (2006.01)

Patent

CA 2591787

The invention provides a miniature robust fiber optic pressure sensor. The miniature fiber optic sensor comprises a Fabry-Perot chip bonded to an optical fiber. The invention provides a new sensor design that reduces the amount of adhesive required to bond the optical fiber to the Fabry-Perot sensor such that the sensor is less sensitive to moisture. The invention also provides manufacturing methods of the sensor comprising a method based on etching and a method based on using an excimer laser. The invention also provides a chip design that renders the chip less sensitive to thermal changes. The invention also provides a chip design in which a sensor diaphragm has a well-defined thickness. The invention also provides a chip design that protects the chip from etching.

Cette invention concerne un capteur de pression miniature et robuste à fibre optique. Ledit capteur comprend une puce Fabry-Pérot scellée sur une fibre optique. L'invention inclut une nouvelle conception de puce qui réduit la quantité d'adhésif requise pour sceller la fibre optique au capteur Fabry-Pérot et accroît par conséquent la résistance du capteur à l'humidité. L'invention porte également sur plusieurs procédés de fabrication du capteur, dont un procédé basé sur la gravure et un autre, sur l'utilisation d'un laser à excimère. L'invention offre en outre une conception de puce qui augmente la résistance de la puce aux variations thermiques, inclut un diaphragme de détection à épaisseur précise et permet de protéger la puce contre la gravure.

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