H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 41/08 (2006.01) H01L 41/22 (2006.01) H03H 9/46 (2006.01)
Patent
CA 2163033
Embodiments of the present invention provide a small and well-characterized bulk acoustic wave device by fabricating a filter having a wide band width or a resonator having a wide oscillation frequency range together with a semiconductor circuit. In embodiments of the present invention, a bulk acoustic wave device comprises a semiconductor substrate having a dielectric substance layer thereon, the dielectric substance layer has a ground conductor layer thereon, the ground conductor layer has a piezoelectric ceramic thin film thereon and the piezoelectric ceramic thin film has a conductive electrode pattern thereon. The thickness of the piezoelectric ceramic thin film is more than ten times the thickness of the ground conductor layer, and the wave number of acoustic waves that propagate in a direction parallel to a surface of the piezoelectric ceramic thin film multiplied by the thickness of the piezoelectric ceramic thin film is less than 2.
Honda Toshihisa
Kameyama Shunpei
Kimura Tomonori
Maeda Chisako
Misu Koichiro
Kirby Eades Gale Baker
Mitsubishi Denki Kabushiki Kaisha
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