A low temperature sintering route for aluminum nitride ceramics

C - Chemistry – Metallurgy – 04 – B

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C04B 35/581 (2006.01) H01L 23/06 (2006.01) H01L 23/08 (2006.01) H01L 23/14 (2006.01) H01L 23/485 (2006.01) H01L 23/50 (2006.01)

Patent

CA 2178824

An aluminum nitride ceramic having de- sired properties suitable for electronic packag- ing applications cam be prepared from a novel aluminum nitride powder/sintering aid mixture. The sintering aid comprises a glassy component formed from alumina, calcia and boria, and a non-vitreous component comprising an element or compound of a metal of Group IIa, IIIa, or the lanthanides, preferably crystalline oxides, reactible with the crystallized glass component and the alumina from the AIN grains. Alter- natively, the sintering aid comprises a multi- component glass composition capable of form- ing the above components upon melting and thereafter crystallizing upon reaction.

Une céramique en nitrure d'aluminium, dont les propriétés désirées sont appropriées à des applications de conditionnement électronique, peut être préparée à partir d'un nouveau mélange poudre de nitrure d'aluminium/auxiliaire de frittage. L'auxiliaire de frittage comprend un composant vitreux formé à partir de l'oxyde d'aluminium, de calcium et de bore, et un composant non vitreux comprenant un élément ou composé d'un métal du groupe IIa, IIIa, ou des lanthanides, de préférence des oxydes cristallins, pouvant réagir avec le composant vitreux cristallisé et l'oxyde d'aluminium à partir des grains AlN. Selon une autre variante, l'auxiliaire de frittage comprend une composition de verre à plusieurs composants pouvant former les composants ci-dessus lors de la fusion, et ensuite les cristalliser lors de la réaction.

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