A method for detection of micrometric and sub-micrometric...

G - Physics – 01 – N

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G01N 23/223 (2006.01) G21K 7/00 (2006.01)

Patent

CA 2504195

Described herein is a method for detection of micrometric and sub-micrometric images with high resolution and high dynamics of contrast, and suited for enabling microradiography, x-ray microscopy and the production of coloured configurations in dielectric materials. The method consists of radiation of energy comprised between 20 and 2000 eV for irradiating a mask or a biological specimen and use of a detector consisting of LiF in the form of a crystal or a film. The power of the radiation released in the LiF detector during exposure is preferably >= 10mW/cm3.

L'invention concerne un procédé de détection d'images micrométriques et sub-micrométriques avec une haute résolution et des dynamiques de contraste élevées, qui peut être utilisé en micrographie, en microscopie par rayons X ainsi que dans l'élaboration de configurations colorées dans des matériaux diélectriques. Ce procédé consiste à diriger de l'énergie comprise entre 20 et 2000 eC sur un masque ou un échantillon biologique et à faire intervenir un détecteur à base de LiF sous forme de cristal ou de film. De préférence, la quantité d'énergie de rayonnement libérée dans le détecteur LiF au cours de l'exposition est >= 20mW/cm?3¿.

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