A method for fabricating high aspect ratio electrodes

Details A method for fabricating high aspect ratio electrodes A method for fabricating high aspect ratio electrodes

H - Electricity

01

L

H01L 29/41 (2006.01) H01L 21/28 (2006.01) H01L 21/8239 (2006.01) H01L 27/105 (2006.01)

Patent

CA 2466151

In a method for building high aspect ratio electrodes in an electrode means (E) comprising parallel electrodes (.epsilon.1, .epsilon.2) in a dense arrangement, the electrodes are built in a repeatedly performed sequence of successive process steps involving the use of only one and the same photomask in every patterning step, the electrodes being formed with a desired aspect ratio according to the number of times the sequence is repeated, and top surface of the electrode means planarized in a final process step.

L'invention concerne un procédé de fabrication d'électrodes à grand allongement dans un dispositif à électrodes (<I>E</I>) comprenant des électrodes parallèles (.epsilon.¿1?, .epsilon.¿2?) placées dans une configuration dense. Les électrodes sont construites selon une séquence répétée d'étapes de traitement successives mettant en oeuvre un seul et même photomasque à chaque étape de la configuration. Les électrodes sont formées avec un allongement désiré, en fonction du nombre de répétitions de la séquence; et la face supérieure du dispositif à électrodes est planarisée dans une étape de traitement finale.

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