A method for fabrication of multi-step structures using...

Details A method for fabrication of multi-step structures using... A method for fabrication of multi-step structures using...

B - Operations, Transporting

29

D

B29D 11/00 (2006.01) B41J 2/00 (2006.01) G02B 3/08 (2006.01) G03F 7/00 (2006.01)

Patent

CA 2288480

A method of fabrication is provided for multi-step microlithographic structures including Fresnel lenses whereby the process includes the formation of intermediate etch stop layers that are embedded with the structure material. This is accomplished in one aspect of the invention by depositing Fresnel lens material using known techniques and selectively altering the chemistry of the material being deposited to form the intermediate etch stop layers at suitable positions without interrupting the deposition process. In another aspect, etch stop layers are patterned on layers of the lens material and embedded between such layers. The structure, or lens, is then formed using masking, patterning and etching techniques.

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