A method for making flexible circuits

H - Electricity – 05 – K

Patent

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H05K 3/00 (2006.01) H01L 21/311 (2006.01)

Patent

CA 2369658

A process for making flexible circuits wherein the etching of a polymeric film is accomplished by dissolving portions thereof with concentrated aqueous base using a UV-curable 100 % active liquid photoresist as a mask, comprising the steps of laminating the resist on a polymeric film, exposing a pattern into the resist, developing the resist with a dilute aqueous solution until desired image is obtained, etching portions of the polymeric film not covered by the crosslinked resist with a concentrated base at a temperature of from 50 ~C to 120 ~C, and then stripping the resist off the polymeric film.

La présente invention concerne un procédé permettant de fabriquer des circuits souples par lequel on réalise la gravure d'un film polymère en dissolvant des parties de ce film avec une base aqueuse concentrée utilisant en guise de masque, une photorésine liquide active à 100 % polymérisable aux UV. Ce procédé consiste: à contrecoller la résine sur le film polymère, à exposer un circuit dans la résine, à développer la résine avec une solution aqueuse diluée jusqu'à ce que l'on obtienne l'image désirée, à graver des parties du film polymère non recouvertes par la résine réticulée avec une base concentrée à une température comprise entre 50 ·C et 120 ·C, et enfin à décoller la résine du film polymère.

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