A method of coating edges with diamond-like carbon

Details A method of coating edges with diamond-like carbon A method of coating edges with diamond-like carbon

C - Chemistry, Metallurgy

23

C

C23C 16/26 (2006.01)

Patent

CA 2290514

A method of creating a diamond-like carbon film on a substrate (22), including the steps of exposing the substrate to a hydrocarbon gas environment and generating plasma in the environment of an electron density greater than approximately 5 x 10 10 per cm3 and a sheath thickness less than about 2 mm under conditions of high ion flux and controlled, low energy ion bombardment. Also, an article of manufacture which includes a substrate having a surface and a diamond-like carbon film on the surface, wherein the film has a hardness greater than approximately 20 Gpa and no discemable grains 300 .ANG. or greater in diameter when viewed at a magnification of 50,000X in a field-emission scanning electron microscope.

L'invention concerne un procédé permettant de créer un film de carbone de type diamant sur un substrat (22), lequel procédé consiste à exposer le substrat à un environnement gazeux hydrocarburé et à générer un plasma dans cet environnement d'une densité électronique supérieure à environ 5 x 10<10>/cm<3> ainsi que d'une épaisseur enveloppante inférieure à 2 mm, dans des conditions de flux ionique élevé et de bombardement ionique contrôlé de faible énergie. L'invention concerne également un produit fabriqué comprenant un substrat pourvu d'une surface et d'un film de carbone de type diamant sur cette surface, le film étant caractérisé par une dureté supérieure à environ 20 Gpa et par des grains non discernables d'un diamètre égal ou supérieur à 300 ANGSTROM lorsqu'on les observe à un grossissement de 50.000X dans un microscope électronique à balayage à émission de champ.

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