A method of depositing an inorganic film on an organic polymer

Details A method of depositing an inorganic film on an organic polymer A method of depositing an inorganic film on an organic polymer

C - Chemistry, Metallurgy

23

C

C23C 16/00 (2006.01) B05D 7/00 (2006.01) C08J 3/20 (2006.01) C08J 7/06 (2006.01) C23C 16/40 (2006.01) C23C 16/44 (2006.01)

Patent

CA 2452656

Inorganic materials are deposited onto organic polymers using ALD methods. Ultrathin, conformal coatings of the inorganic materials can be made in this manner. The coated organic polymers can be used as barrier materials, as nanocomposites, as catalyst supports, in semiconductor applications, in coating applications as well as in other applications.

Selon l'invention, pour déposer des matières inorganiques sur des polymères organiques, on fait appel à des procédés de dépôt de couches atomiques. Grâce à ces procédés, on obtient, avec lesdits matériaux inorganiques, des revêtements ultraminces conformes. Les polymères organiques revêtus peuvent être utilisés comme matériaux barrières, comme nanocomposites, comme supports de catalyseurs, dans des applications impliquant l'utilisation de semi-conducteurs, dans la réalisation de revêtements, et dans d'autres applications.

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