A method of fabricating a zinc oxide based resonator

Details A method of fabricating a zinc oxide based resonator A method of fabricating a zinc oxide based resonator

H - Electricity

04

R

H04R 17/10 (2006.01) H03H 3/08 (2006.01) H03H 9/02 (2006.01) H03H 9/17 (2006.01)

Patent

CA 2330200

A method of fabricating a resonator is disclosed. The method initially comprises the step of providing a substrate base having a dielectric layer(s). Thereafter, an adhesive layer is formed on the dielectric layer(s), and a nucleation promoting film is formed over the adhesive layer. A zinc oxide layer is subsequently formed over the nucleation promoting film, and a top conductive layer is formed over the layer of zinc oxide.

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