A method of forming a superconductor

Details A method of forming a superconductor A method of forming a superconductor

H - Electricity

01

L

H01L 39/24 (2006.01)

Patent

CA 2246602

Disclosed herein is a method of forming a superconductor, comprising the steps of providing a substrate and exposing the substrate to a first atmosphere, including precursors to form a first epitaxial layer segment. The first layer segment is then exposed to a second atmosphere, including precursors to form a second epitaxial layer segment, and the second layer segment is exposed to a third atmosphere including precursors to form a third epitaxial layer segment. Each of the first and thud layer segments are each formed from a superconductor material and the second layer segment is formed from a material different from the first and third layer segments and the first, second and third layer segments have a collective thickness, the third layer segment having an outer surface with a roughness which is less than that of a single layer of the superconductor material with a thickness equal to the collective thickness.

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