A method of producing a planar waveguide device having a...

G - Physics – 02 – B

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G02B 6/13 (2006.01) C03C 15/00 (2006.01) G02B 6/12 (2006.01) G02B 6/125 (2006.01) G02B 6/132 (2006.01) G02B 6/136 (2006.01) G02B 6/34 (2006.01) G02F 1/225 (2006.01) G02F 1/01 (2006.01)

Patent

CA 2373546

A method of producing a planar waveguiding device having a core (10) and a cladding (21, 22, 23). The cladding has grooves (11, 12) directly interfacing (15, 16) with the core (10). A layer of core glass (10) is deposited on the surface of a substrate (24). This layer is etched to produce a shaped layer which includes a first core portion (10) having the same configuration as the intended core (10) and an expanded core portion (30) wherein the core glass extends beyond the intended core boundary. A glass covering layer (21) is deposited over the etched core glass and grooves (11, 12) are produced by etching through the covering layer (21) and into said expanded core portion (30). This removes the core glass (30) extending beyond the intended core (10) boundary to produce interfaces (15, 16) between the core (10) and the grooves (11, 12). All of the glasses are silica with additives to adjust the refractive index and/or the melting point.

La présente invention concerne un procédé de production de dispositif guide d'onde plan comportant un coeur (10) et une gaine (21,22,23). La gaine comporte des encoches (11, 12) en interface directe (15, 16) avec le coeur (10). Une couche de verre de coeur (10) est déposée sur la surface d'un substrat (24). Cette couche est attaquée afin de produire une couche avec forme comprenant une première portion de coeur (10) de même configuration que le coeur projeté (10) et une portion de coeur expansée (30) dans laquelle le verre s'étend au delà de la limite du coeur projeté. Une couche recouvrante (21), en verre, est déposée sur le verre de coeur attaqué, et les encoches (11, 12) sont formées par attaque à travers la couche recouvrante (21) ainsi que dans la portion de coeur expansée (30). Cette opération permet d'enlever le verre de coeur (30) qui s'étend au delà de la limite du coeur projeté (10) afin de produire des interfaces (15, 16) entre le coeur (10) et les encoches (11, 12). Les verres utilisés sont constitués de silice et d'additifs aux fins d'ajustement de l'indice de réfraction et/ou du point de fusion.

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