A method to encapsulate phosphor via chemical vapor deposition

C - Chemistry – Metallurgy – 23 – C

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C23C 16/30 (2006.01) B32B 33/00 (2006.01) C23C 16/40 (2006.01)

Patent

CA 2525823

The maintenance characteristics of the phosphors (60) used in VUV-excited devices such as plasma display panels can be improved by applying a coating of an aluminum oxyhydroxide compound by reacting vaporized trimethylaluminum with water vapor at a temperature of about 430 ~C or above. In particular, the maintenance of an europium-activated, calcium-substituted barium hexa- aluminate phosphor (60) is significantly improved following exposure to a high intensity VUV flux.

Les caractéristiques de maintien des phosphores utilisés dans des dispositifs excités aux VUV, tels que des panneaux d'affichage au plasma, peuvent être améliorées en appliquant un revêtement d'un composé d'oxyhydroxyde d'aluminium, en faisant réagir du triméthylaluminium vaporisé avec de la vapeur d'eau, à une température égale ou supérieure à environ 430 ·C. En particulier, le maintien d'un phosphore à l'hexa-aluminate de baryum activé à l'europium, et substitué par du calcium est significativement amélioré à la suite d'une exposition à un flux VUV d'intensité élevée.

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