A micro-electro-mechanical two dimensional mirror with...

G - Physics – 02 – B

Patent

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G02B 26/08 (2006.01) B81B 7/02 (2006.01)

Patent

CA 2526231

The invention provides a micro-electro-mechanical-system (MEMS) mirror device, comprising: a mirror having a 2-dimensional rotational articulated hinge at a first end, and having a 1-dimensional rotational articulated hinge at a second end opposite the first end; a movable cantilever connected to the mirror through the 1-dimensional rotational articulated hinge; a support structure connected to the mirror through the 2-dimensional rotational articulated hinge and connected to the movable cantilever; whereby movement of said movable cantilever causes rotation of the mirror in a first axis of rotation, and the mirror is also rotatable about a second torsional axis of rotation perpendicular to said first axis of rotation.

L'invention concerne un dispositif à miroir à système micro-électromécanique (MEMS), caractérisé en ce qu'il comprend un miroir présentant, à une première extrémité, une charnière articulée en rotation bidimensionnelle et, à une seconde extrémité opposée à la première, une charnière articulée en rotation unidimensionnelle ; un élément en porte-à-faux relié au miroir par ladite charnière articulée en rotation unidimensionnelle ; une structure support reliée au miroir par ladite charnière articulée en rotation bidimensionnelle et reliée à l'élément en porte-à-faux ; en ce que le mouvement dudit élément en porte-à-faux provoque la rotation du miroir dans un premier axe de rotation, et en ce que le miroir est également entraîné en rotation autour d'un second axe de torsion en rotation, perpendiculaire audit premier axe de rotation.

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