A non-sticking diamond like nanocomposite composition

C - Chemistry – Metallurgy – 23 – C

Patent

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Details

C23C 16/30 (2006.01) B32B 5/16 (2006.01) B32B 9/04 (2006.01) C01B 31/02 (2006.01) C23C 14/02 (2006.01) C23C 16/02 (2006.01) C23C 16/26 (2006.01) C23C 16/42 (2006.01) H05H 1/00 (2006.01)

Patent

CA 2294420

The invention relates to an improved non-sticking diamond-like nanocomposite composition comprising networks of a-C:H and a-Si:O wherein the H-concentration is between 85 % and 125 % of the C- concentration. The composition comprises preferably 25 to 35 at% of C, 30 to 40 at% of H, 25 to 30 at% of Si and 10 to 15 at% of O. The invention relates also to a process for coating a substrate in a vacuum chamber with such a composition and to its use e.g. to cover surfaces of moulding means.

L'invention concerne une composition améliorée de nanocomposite non adhésif de type diamant comprenant des réseaux de a-C:H et a-Si:O dans laquelle la concentration de H est comprise entre 85 et 125 % de la concentration de C. La composition comprend de préférence 25 à 30 % de C, 30 à 40 % de H, 25 à 30 % de Si et 10 à 15 % de O. L'invention concerne également un procédé de revêtement d'un substrat dans une chambre à vide avec cette composition et son utilisation par exemple pour couvrir les surfaces d'appareils à mouler.

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