B - Operations – Transporting – 41 – M
Patent
B - Operations, Transporting
41
M
B41M 5/36 (2006.01) B41C 1/10 (2006.01) B41M 5/26 (2006.01) G05D 23/19 (2006.01)
Patent
CA 2428118
The present invention relates to a process and an apparatus for producing patterns, particularly high-resolution patterns, in films which are exposed to temperature gradients. In particular, there is provided a process for producing lithographic structures by exposing at least one film on a substrate to a temperature gradient, the temperature gradient generating forces in the film which cause a mass transfer in the film to thereby produce a lithographic pattern.
La présente invention concerne un procédé et un dispositif destinés à produire des motifs, et notamment des motifs à haute résolution, sur des films exposés à des gradients de température. Plus particulièrement, l'invention se rapporte à un procédé de production de structures lithographiques par exposition d'au moins un film disposé sur un substrat à un gradient de température, ce gradient de température produisant des forces impliquant un transfert de masse dans ce film, d'où la production d'un motif lithographique.
Schaffer Erik
Steiner Ullrich
Applied Nanosystems B.v.
Ridout & Maybee Llp
LandOfFree
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