A process for large-scale production of cdte/cds thin film...

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H01L 31/18 (2006.01) C23C 14/06 (2006.01) C23C 14/08 (2006.01) C23C 14/58 (2006.01) H01L 31/0224 (2006.01) H01L 31/072 (2006.01)

Patent

CA 2462590

A process for the large-scale production of CdTe/CdS thin film solar cells, said films being deposited as a sequence on a transparent substrate, comprising the steps 5 of: depositing a film of a transparent conductive oxide (TCO) on said substrate; depositing a film of CdS on said TCO film; depositing a film of CdTe on said CdS film; treating said CdTe film with CdC12; depositing a back-contact film on said treated CdTe film. The treatment 10 of the CdTe film with CdC12 comprises the following steps: forming a layer of CdC12 on the CdTe film by evaporation, while keeping the substrate at room temperature; annealing said CdC12 layer in a vacuum chamber at 380-420oC and 300- 1000 mbar under inert gas atmosphere;-removing the inert 15 gas from said chamber to produce vacuum condition, while the substrate is kept to a temperature of 350-420OC whereby any residual CdC12 is evaporated from the CdTe film surface.

L'invention concerne un procédé permettant la production à grande échelle de photopiles en couches minces de CdTe/CdS, ces films étant déposés en séquence sur un substrat transparent. Ce procédé comprend les étapes consistant: à déposer un film d'un oxyde conducteur transparent (TCO) sur le substrat, à déposer un film de CdS sur ce film de TCO, à déposer un film de CdTe sur le film de CdS, à traiter ce film de CdTe avec CdCl¿2?, et à déposer un film de contact arrière sur le film de CdTe traité. Le traitement du film de CdTe avec CdCl¿2? comprend les étapes consistant: à former une couche de CdCl¿2? sur le film de CdTe par évaporation, tout en maintenant le substrat à température ambiante, à recuire cette couche de CdCl¿2? dans une chambre à vide à une température de 380-420 ·C et une pression de 300-1000 mbar dans une atmosphère de gaz inerte, à éliminer le gaz inerte de cette chambre afin de créer des conditions de vide alors que le substrat est maintenu à une température de 350-420 ·C, tout CdCl¿2? résiduel étant évaporé de la surface du film de CdTe.

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