A process for manufacturing ito alloy articles

Details A process for manufacturing ito alloy articles A process for manufacturing ito alloy articles

C - Chemistry, Metallurgy

23

C

C23C 14/34 (2006.01) C22C 1/10 (2006.01) C22C 29/12 (2006.01)

Patent

CA 2228402

The invention relates to a process for manufacturing a pore free powder metallurgical alloy article starting with a minor portion of Sn powder and a major portion of In2O3 powder and comprising the steps of: substantially uniformly distributing and fixing the Sn powder on the surface of the In2O3 powder by mixing and milling the different powders in the presence of a process controlling agent to form alloyed powders; and compacting at high temperature the so alloyed powders to form the article. The article has a good electrical conductivity and is usable as a target for plasma sputtering ITO compositions.

Cette invention se rapporte à un procédé pour fabriquer un article en alliage de poudres métalliques sans pores, en commençant avec une petite proportion de poudre de Sn et une grande proportion de poudre de In2O3 et consistant: à répartir et à fixer de manière sensiblement uniforme la poudre de Sn sur la surface de la poudre de In2O3 en mélangeant et en broyant les différentes poudres en présence d'un agent de régulation du procédé, afin de former des poudres alliées; et à compacter à température élevée les poudres ainsi alliées, afin de former l'article souhaité. Cet article possède une bonne conductivité électrique et il est utilisable comme cible pour la pulvérisation au plasma de compositions IEO (indium-étain-oxyde).

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