A securing device for a sputtering source

Details A securing device for a sputtering source A securing device for a sputtering source

C - Chemistry, Metallurgy

23

C

C23C 14/34 (2006.01)

Patent

CA 2579934

A securing device for a sputtering source in a sputtering space includes a current transmitting means (2, 10, 13, 15, 16, 17, 18) of electrically and thermally conductive material for the conducting of a current to the sputtering source and also a screening means (1, 4, 5, 6, 12) for the screening of the current transmitting means from the sputtering space, so that the current transmitting means can be electrically insulated from the sputtering space, characterised in that temperature resistant means (1, 5) are provided to guarantee a temperature resistance and a resistance to electrical discharges of the securing device, in particular at temperatures up to 1150° C.

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