G - Physics – 02 – B
Patent
G - Physics
02
B
G02B 6/12 (2006.01) G02B 6/136 (2006.01) G02B 6/36 (2006.01) G02B 6/42 (2006.01)
Patent
CA 2324675
An optical component mounting substrate is formed by forming a protection film on an entire top surface of the substrate; forming pattern holes corresponding to the first and second grooves in the protection film by a single mask having holes corresponding to the first and second grooves; forming a protection seal on a pattern hole corresponding to one of the first and second grooves; applying anisotropic etching to the substrate through the not-sealed pattern hole to thereby form the other of the first and second grooves; removing the protection seal; forming another protection seal on the groove formed by anisotropic etching; applying anisotropic etching to the substrate through the seal-removed pattern hole to thereby form the remaining one of the first and second grooves; and removing the protection film and the another protection seal from the substrate.
Hiraoka Michiaki
Nakashima Keiko
Takemura Koji
Kyocera Corporation
Riches Mckenzie & Herbert Llp
LandOfFree
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