B - Operations – Transporting – 24 – D
Patent
B - Operations, Transporting
24
D
B24D 11/00 (2006.01) B24B 37/04 (2006.01) B24B 49/04 (2006.01) B24B 49/12 (2006.01) B24D 7/12 (2006.01)
Patent
CA 2430377
A process for planarizing, polishing, or providing other modification of a wafer surface (22) or other workpiece. The process includes using an abrasive article (140) having a textured abrasive coating affixed (146) to a backing. The abrasive article includes a monitoring element, such as a window (148), to allow transmission of radiation therethrough. The radiation level is monitored throughout the planarization process to determine the approach of the desired endpoint. The window in the abrasive coating can be an area devoid of abrasive coating or having minimal or a thinned abrasive coating.
L'invention concerne un procédé permettant la planarisation, le polissage ou une autre modification de la surface (22) d'une plaquette ou d'une autre pièce. Ce procédé comprend l'utilisation d'un article (140) abrasif qui présente un revêtement (146) abrasif structuré fixé sur un support. Cet article abrasif comprend un élément de surveillance, par exemple une fenêtre (148), qui laisse passer un rayonnement. La surveillance du niveau du rayonnement pendant tout le processus de planarisation permet de détecter l'approche du point souhaité de fin de processus. La fenêtre dans le revêtement abrasif peut être constituée d'une zone sans revêtement abrasif ou d'une zone présentant un revêtement abrasif minimal ou dont l'épaisseur a été réduite.
Bruxvoort Wesley J.
Fizel Jerry J.
Gagliardi John J.
Kim Chong Yong
Muilenburg Michael J.
3m Innovative Properties Company
Smart & Biggar
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