G - Physics – 01 – L
Patent
G - Physics
01
L
73/3
G01L 9/12 (2006.01) G01L 9/00 (2006.01)
Patent
CA 1316010
"ABSOLUTE CAPACITANCE MANOMETERS" ABSTRACT A single fluid-pressure transducer unit, of the type in which sensed electrical capacitance is varied in accordance with electrode deflections induced by pressure changes, is rendered capable of characterizing a wide range of pressures extending from near-vacuum to atmospheric levels, with the aid of a distinctive composite-electrode capsule which interacts uniquely with a conventional type of sheet-metal diaphragm. While sensing relatively low pressures, the exhibited capacitance of the transducer is essentially that appearing between the diaphragm and a nearby electrode carried by the capsule, but, at or near atmospheric pressure, the diaphragm physically engages and deflects that electrode, which is elastically deformable, causing it to vary a further capacitance appearing between that deformable electrode and a companion stationary electrode which is also part of the capsule.
563491
Benson Richard A.
Denner John A.
Mks Instruments Inc.
Smart & Biggar
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