Accelerated growth from the gaseous phase of gallium...

C - Chemistry – Metallurgy – 30 – B

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148/2.1

C30B 23/00 (2006.01) C30B 25/00 (2006.01) C30B 28/12 (2006.01) H01L 21/205 (2006.01)

Patent

CA 1086610

ABSTRACT: A method of growing gallium arsenide crystals obtained by reaction of a first gaseous phase containing hy- drogen and arsenic trichloride and a liquid gallium phase, in which the said reaction forms a second gaseous phase from which gallium arsenide is deposited in such circumstances that the molar fraction of arsenic trichloride is larger than 2.10-2 and is preferably between 2.10-2 and 10-1. - 11 -

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