Accelerometer

G - Physics – 01 – P

Patent

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G01P 15/125 (2006.01)

Patent

CA 2104848

-13- ABSTRACT OF THE DISCLOSURE A plate-shaped reference mass member (13) is supported to a support member 11 through an elastic hinge (12). An electrode (21) is disposed on one surface of the reference mass member (13). An electrode (22) spaced apart from and opposed to the electrode (21) is supported to the support member (11). A capacitor (22) formed by the electrodes (21) and (22) is connected to form a part of an oscillation circuit (24). The oscillation frequency of the oscillation circuit (24) is counted by a counter (27). A subtracter (29) calculates the difference between the counted value and a count value stored in a register 28 when no acceleration is applied. The difference is output as a detected acceleration being applied.

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